Kinetics of Nitrogen Indiffusion in Czochralski Silicon Annealed in Nitrogen Ambient
Ming, Li, Xiang-Yang, Ma, De-Ren, YangVolume:
25
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/25/2/079
Date:
February, 2008
File:
PDF, 111 KB
english, 2008