Light Induced Rapid Thermal Diffusion of Boron Atom in Silicon
Wanquan, Shi, Qingrun, Hou, Xuejun, Liu, Shixiang, Liu, Zhengqing, Fu, Liwu, Lu, Yuanjing, LiVolume:
9
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/9/9/008
Date:
September, 1992
File:
PDF, 201 KB
english, 1992