Metastable oxygen - silicon interstitial complex in...

Semiconductor Science and Technology 1996 / 11 Vol. 11; Iss. 11

Metastable oxygen - silicon interstitial complex in crystalline silicon

Abdullin, Kh A, Mukashev, B N, Gorelkinskii, Yu V
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Volume:
11
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/11/11/010
Date:
November, 1996
File:
PDF, 225 KB
english, 1996
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