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Time-temperature profiles for optimal internal gettering of iron in silicon
Hieslmair, H, Istratov, A A, Weber, E RVolume:
13
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/13/12/012
Date:
December, 1998
File:
PDF, 147 KB
english, 1998