Selective epitaxial growth of dot structures on patterned...

Semiconductor Science and Technology 1999 / 03 Vol. 14; Iss. 3

Selective epitaxial growth of dot structures on patterned Si substrates by gas source molecular beam epitaxy

Kim, Eun Soo, Usami, Noritaka, Shiraki, Yasuhiro
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Volume:
14
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/14/3/009
Date:
March, 1999
File:
PDF, 1.19 MB
english, 1999
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