Total dose radiation effects of Pt/PZT/Pt ferroelectric...

Semiconductor Science and Technology 1999 / 09 Vol. 14; Iss. 9

Total dose radiation effects of Pt/PZT/Pt ferroelectric capacitors fabricated by PLD method

Gao, Jianxia, Zheng, Lirong, Huang, Biping, Song, Zhitang, Yang, Lixin, Fan, Yunjing, Zhu, Dezhang, Lin, Chenglu
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Volume:
14
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/14/9/315
Date:
September, 1999
File:
PDF, 166 KB
english, 1999
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