Study of GaN thin films grown on vicinal SiC (0001)...

Semiconductor Science and Technology 2002 / 09 Vol. 17; Iss. 9

Study of GaN thin films grown on vicinal SiC (0001) substrates by molecular beam epitaxy

Lu, Liwu, Yan, Hua, Yang, C L, Xie, Maohai, Wang, Zhanguo, Wang, J, Ge, Weikun
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Volume:
17
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/17/9/310
Date:
September, 2002
File:
PDF, 114 KB
english, 2002
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