Influence of discrete impurity position in the channel of...

Semiconductor Science and Technology 2004 / 04 Vol. 19; Iss. 4

Influence of discrete impurity position in the channel of an ultra-small MOSFET

Dollfus, Philippe, Galdin-Retailleau, Sylvie, Bournel, Arnaud, Monsef, Florian, Barraud, Sylvain, Hesto, Patrice
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Volume:
19
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/19/4/053
Date:
April, 2004
File:
PDF, 97 KB
english, 2004
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