Sputter-induced damage in Al/n-GaAs and Al/p-GaAs Schottky...

Semiconductor Science and Technology 1987 / 05 Vol. 2; Iss. 5

Sputter-induced damage in Al/n-GaAs and Al/p-GaAs Schottky barriers

Vandenbroucke, D A, Meirhaeghe, R L van, Laflere, W H, Cardon, F
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Volume:
2
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/2/5/008
Date:
May, 1987
File:
PDF, 619 KB
english, 1987
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