Two-beam cross-modulation photocarrier radiometry:...

Two-beam cross-modulation photocarrier radiometry: principles and contrast amplification in semiconductor subsurface imaging

Shaughnessy, Derrick, Mandelis, Andreas, Batista, Jerias, Tolev, Jordan, Li, Bincheng
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Volume:
21
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/21/3/021
Date:
March, 2006
File:
PDF, 470 KB
english, 2006
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