Microwave irradiation impact on Ta 2...

Semiconductor Science and Technology 2008 / 03 Vol. 23; Iss. 3

Microwave irradiation impact on Ta 2 O 5 stack capacitors with different gates

Atanassova, E, Mitin, V F, Konakova, R V, Spassov, D, Schinkarenko, V V
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Volume:
23
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/23/3/035004
Date:
March, 2008
File:
PDF, 266 KB
english, 2008
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