A high-performance trench capacitor integrated in a passive...

A high-performance trench capacitor integrated in a passive integration technology

Geiselbrechtinger, Angelika, Büyüktas, Kevni, Allers, Karl-Heinz, Hartung, Wolfgang
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
24
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/24/1/015010
Date:
January, 2009
File:
PDF, 1.23 MB
english, 2009
Conversion to is in progress
Conversion to is failed