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A high-performance trench capacitor integrated in a passive integration technology
Geiselbrechtinger, Angelika, Büyüktas, Kevni, Allers, Karl-Heinz, Hartung, WolfgangVolume:
24
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/24/1/015010
Date:
January, 2009
File:
PDF, 1.23 MB
english, 2009