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Simulation and modelling of a high-performance trench capacitor for RF applications
Büyüktas, Kevni, Geiselbrechtinger, Angelika, Decker, Stefan, Koller, KlausVolume:
24
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/24/7/075007
Date:
July, 2009
File:
PDF, 1.68 MB
english, 2009