Electron beam lithography simulation for sub-quarter-micron patterns on superconducting substrates
A. Olzierski, K. Vutova, G. Mladenov, I. Raptis, T. DonchevYear:
2004
Language:
english
DOI:
10.1088/0953-2048/17/7/010
File:
PDF, 423 KB
english, 2004