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Increase of maximum detectable slope with optical profilers, through controlled tilting and image processing
F. Marinello, P. Bariani, A. Pasquini, L. D. Chiffre, M. Bossard, G. B. PicottoYear:
2007
Language:
english
DOI:
10.1088/0957-0233/18/2/S09
File:
PDF, 1.12 MB
english, 2007