Apparatus for Langmuir probe monitoring of plasma during...

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Apparatus for Langmuir probe monitoring of plasma during deposition processes

P. Spatenka, R. Studeny, H. Suhr
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Year:
1992
Language:
english
DOI:
10.1088/0957-0233/3/8/003
File:
PDF, 320 KB
english, 1992
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