The use of etched registration markers to make...

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The use of etched registration markers to make four-terminal electrical contacts to STM-patterned nanostructures

F. J. Rueß, L. Oberbeck, K. E. J. Goh, M. J. Butcher, E. Gauja, A. R. Hamilton, M. Y. Simmons
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Year:
2005
Language:
english
DOI:
10.1088/0957-4484/16/10/076
File:
PDF, 485 KB
english, 2005
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