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Performance enhancement of semiconductor devices by control of discrete dopant distribution
M. Hori, T. Shinada, K. Taira, N. Shimamoto, T. Tanii, T. Endo, I. OhdomariYear:
2009
Language:
english
DOI:
10.1088/0957-4484/20/36/365205
File:
PDF, 708 KB
english, 2009