Through-wafer interconnect technology for silicon

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Through-wafer interconnect technology for silicon

V. G. Kutchoukov, M. Shikida, J. R. Mollinger, A. Bossche
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Year:
2004
Language:
english
DOI:
10.1088/0960-1317/14/7/025
File:
PDF, 788 KB
english, 2004
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