Packaging of silicon sensors for microfluidic...

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Packaging of silicon sensors for microfluidic bio-analytical applications

R. Wimberger-friedl, T. Nellissen, W. Weekamp, J. V. Delft, W. Ansems, M. Prins, M. Megens, W. Dittmer, C. D. Witz, B. V. Iersel
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Year:
2009
Language:
english
DOI:
10.1088/0960-1317/19/1/015015
File:
PDF, 1.07 MB
english, 2009
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