The MEMSamp: using (RF-)MEMS switches for the micromechanical amplification of electronic signals
W. M. Van Spengen, S. B. Roobol, W. P. Klaassen, T. H. OosterkampYear:
2010
Language:
english
DOI:
10.1088/0960-1317/20/12/125011
File:
PDF, 1.31 MB
english, 2010