Diagnostics of particle genesis and growth in RF silane...

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Diagnostics of particle genesis and growth in RF silane plasmas by ion mass spectrometry and light scattering

C. Hollenstein, J. -. Dorier, J. Dutta, L. Sansonnens, A. A. Howling
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Year:
1994
Language:
english
DOI:
10.1088/0963-0252/3/3/007
File:
PDF, 634 KB
english, 1994
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