Diagnostics of particle genesis and growth in RF silane plasmas by ion mass spectrometry and light scattering
C. Hollenstein, J. -. Dorier, J. Dutta, L. Sansonnens, A. A. HowlingYear:
1994
Language:
english
DOI:
10.1088/0963-0252/3/3/007
File:
PDF, 634 KB
english, 1994