Surface modification and etch product detection during...

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Surface modification and etch product detection during reactive ion etching of InP in - plasma

Y. Feurprier, C. Cardinaud, G. Turban
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Year:
1997
Language:
english
DOI:
10.1088/0963-0252/6/3/010
File:
PDF, 396 KB
english, 1997
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