A gas flow uniformity study in large-area showerhead...

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A gas flow uniformity study in large-area showerhead reactors for RF plasma deposition

L. Sansonnens, A. A. Howling, C. Hollenstein
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Year:
2000
Language:
english
DOI:
10.1088/0963-0252/9/2/314
File:
PDF, 72 KB
english, 2000
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