[OSA Optical Interference Coatings - Banff, Canada...

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[OSA Optical Interference Coatings - Banff, Canada (2001..-..)] Optical Interference Coatings - RAS (Radical Assisted Sputtering) system and its application on depositing optical thin films

Nagae, Ekishu, Sakurai, Takeshi, Matsumoto, Shigeharu
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Year:
2001
Language:
english
DOI:
10.1364/oic.2001.mb5
File:
PDF, 72 KB
english, 2001
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