Syntheses and characterization of organoimido complexes of tantalum; potential single-source precursors to tantalum nitride
Hsin-Tien Chiu, Shiow-Huey Chuang, Chung-En Tsai, Gene-Hsiang Lee, Shie-Ming PengVolume:
17
Year:
1998
Language:
english
Pages:
4
DOI:
10.1016/s0277-5387(98)00051-5
File:
PDF, 292 KB
english, 1998