Syntheses and characterization of organoimido complexes of...

Syntheses and characterization of organoimido complexes of tantalum; potential single-source precursors to tantalum nitride

Hsin-Tien Chiu, Shiow-Huey Chuang, Chung-En Tsai, Gene-Hsiang Lee, Shie-Ming Peng
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Volume:
17
Year:
1998
Language:
english
Pages:
4
DOI:
10.1016/s0277-5387(98)00051-5
File:
PDF, 292 KB
english, 1998
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