Metal–organic chemical vapour deposition of lead scandium...

Metal–organic chemical vapour deposition of lead scandium tantalate: chemical issues and precursor selection

Anthony C Jones, Timothy J Leedham, Hywel O Davies, Kirsty A Fleeting, Paul O’Brien, Michael J Crosbie, Peter J Wright, Dennis J Williams, Penelope A Lane
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Volume:
19
Year:
2000
Language:
english
Pages:
5
DOI:
10.1016/s0277-5387(99)00365-4
File:
PDF, 126 KB
english, 2000
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