Hafnium Nitrate Precursor Synthesis and HfO 2 Thin Film...

Integrated Ferroelectrics 2002 / 01 Vol. 48; Iss. 1

Hafnium Nitrate Precursor Synthesis and HfO 2 Thin Film Deposition

Zhuang, Weiwei, Conley, John F., Ono, Yoshi, Evans, David R., Solanki, R.
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Volume:
48
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584580215449
Date:
January, 2002
File:
PDF, 825 KB
english, 2002
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