A simulation study on lot release control, mask scheduling, and batch scheduling in semiconductor wafer fabrication facilities
Kim Yeong-Dae, Lee Dong-Ho, Kim Jung-Ug, Roh Hwan-KyunVolume:
17
Year:
1998
Language:
english
Pages:
11
DOI:
10.1016/s0278-6125(98)80024-1
File:
PDF, 1.04 MB
english, 1998