[IEEE 2015 16th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM) - Erlagol, Russia (2015.6.29-2015.7.3)] 2015 16th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices - A study of 3D boss structure formation in anisotropic etching of Si (100) in aqueous KOH

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