SPIE Proceedings [SPIE San Diego '92 - San Diego, CA (Sunday 19 July 1992)] Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography - Characterization of WCx/B4C multilayers sputtered in argon/methane atmospheres
Diehl, Patrick E., Lund, Mark W., Madsen, David W., McIntyre, Jr., Larry C., Smith, David J., Hoover, Richard B., Walker II, Arthur B. C.Volume:
1742
Year:
1993
Language:
english
DOI:
10.1117/12.140571
File:
PDF, 846 KB
english, 1993