Design of a phase-shifting interferometer in the extreme ultraviolet for high-precision metrology
Capeluto, María Gabriela, Marconi, Mario Carlos, Iemmi, Claudio CesarVolume:
53
Language:
english
Journal:
Applied Optics
DOI:
10.1364/ao.53.001274
Date:
March, 2014
File:
PDF, 490 KB
english, 2014