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Scanning tunneling microscopy-based on-machine measurement for diamond fly cutting of micro-structured surfaces
Zhu, Wu-Le, Yang, Shunyao, Ju, Bing-Feng, Jiang, Jiacheng, Sun, AnyuLanguage:
english
Journal:
Precision Engineering
DOI:
10.1016/j.precisioneng.2015.08.011
Date:
August, 2015
File:
PDF, 3.17 MB
english, 2015