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Process Development for the Fabrication of a Three Axes Capacitive MEMS Accelerometer
Aydemir, Akin, Akin, TayfunVolume:
120
Year:
2015
Language:
english
Journal:
Procedia Engineering
DOI:
10.1016/j.proeng.2015.08.773
File:
PDF, 765 KB
english, 2015