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SPIE Proceedings [SPIE MOEMS-MEMS 2007 Micro and Nanofabrication - San Jose, CA (Saturday 20 January 2007)] MEMS/MOEMS Components and Their Applications IV - On-chip integration of a microfluidic valve and pump for sample acquisition and movement
Sridharamurthy, S. S., Agarwal, A. K., Dong, L., Cheng, D., Jiang, H., Tadigadapa, Srinivas A., Ghodssi, Reza, Henning, Albert K.Volume:
6464
Year:
2007
DOI:
10.1117/12.705415
File:
PDF, 664 KB
2007