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Stroboscopic supercontinuum white-light interferometer for MEMS characterization
K. Hanhijärvi, I. Kassamakov, V. Heikkinen, J. Aaltonen, L. Sainiemi, K. Grigoras, S. Franssila, E. HæggströmYear:
2012
Language:
english
DOI:
10.1364/ol.37.001703
File:
PDF, 302 KB
english, 2012