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Strong Diffusion Suppression of Low Energy-Implanted Phosphorous in Germanium by N2 Co-Implantation
C. Thomidis, M. Barozzi, M. Bersani, V. Ioannou-sougleridis, N. Z. Vouroutzis, B. Colombeau, D. SkarlatosYear:
2015
Language:
english
DOI:
10.1149/2.0061506ssl
File:
PDF, 673 KB
english, 2015