[IEEE 1998 International Conference on Ion Implantation Technology. Proceedings. Ion Implantation Technology - 98 - Kyoto, Japan (22-26 June 1998)] 1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144) - Advanced implantation systems and development of general purpose unlimited lifetime ECRIS for application on implantation devices
Bieth, C., Bouly, J.L., Curdy, J.C., Kantas, S., Sortais, P., Sole, P., Vieux-Rochaz, J.L.Volume:
1
Year:
1998
Language:
english
DOI:
10.1109/IIT.1999.812138
File:
PDF, 259 KB
english, 1998