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Residual Stress Extraction of Surface-Micromachined Fixed-Fixed Nickel Beams Using a Wafer-Scale Technique
Zeng, Juan, Kovacs, Andrew, Garg, Anurag, Bajaj, Anil K., Peroulis, DimitriosYear:
2015
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2015.2440998
File:
PDF, 3.02 MB
english, 2015