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Dynamically Balanced Folded-Beam Suspensions for Resonators
Shmulevich, Shai, Elata, DavidYear:
2015
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2015.2454593
File:
PDF, 2.31 MB
english, 2015