Characterization of Oxide-Coated Polysilicon Disk Resonator...

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Characterization of Oxide-Coated Polysilicon Disk Resonator Gyroscope Within a Wafer-Scale Encapsulation Process

Ahn, Chae Hyuck, Ng, Eldwin J., Hong, Vu A., Huynh, Julia, Wang, Shasha, Kenny, Thomas W.
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Year:
2015
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2015.2478034
File:
PDF, 4.25 MB
english, 2015
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