Characterization of Oxide-Coated Polysilicon Disk Resonator Gyroscope Within a Wafer-Scale Encapsulation Process
Ahn, Chae Hyuck, Ng, Eldwin J., Hong, Vu A., Huynh, Julia, Wang, Shasha, Kenny, Thomas W.Year:
2015
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2015.2478034
File:
PDF, 4.25 MB
english, 2015