SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California (Saturday 22 January 2011)] MOEMS and Miniaturized Systems X - MEMS-based programmable reflective slit mask for multi-object spectroscopy
Canonica, Michael, Zamkotsian, Frederic, Lanzoni, Patrick, Noell, Wilfried, de Rooij, Nico, Schenk, Harald, Piyawattanametha, WiboolVolume:
7930
Year:
2011
Language:
english
DOI:
10.1117/12.874438
File:
PDF, 3.39 MB
english, 2011