Influence of sputtering atmosphere on crystal quality and...

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Surface and Coatings Technology 2015 / 9

Influence of sputtering atmosphere on crystal quality and electrical properties of zirconium aluminum nitride thin film

Ke, Genshui, Tao, Yuan, He, Zhenni, Guo, Haibo, Chen, Yigang, DiBattista, Jim, Chan, Eason, Yang, Yimou
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Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2015.09.046
Date:
September, 2015
File:
PDF, 987 KB
english, 2015
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