Laser Micromachining and Characterization of Metal-on-Glass...

Journal of Microelectromechanical Systems 2015 / 10 Vol. 24; Iss. 5

Laser Micromachining and Characterization of Metal-on-Glass High Density Pitch Adapters

Perez, Eliseo, Rey-Garcia, Francisco, Bao-Varela, Carmen, de la Fuente, German F., Dosil, Alvaro, Gallas, Abraham A., Rodriguez, Pablo
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Volume:
24
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2015.2413051
Date:
October, 2015
File:
PDF, 3.00 MB
english, 2015
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