[ECS 215th ECS Meeting - San Francisco, CA (May 24 - May 29, 2009)] ECS Transactions - Atomic Layer Deposition of Antimony Oxide on Hydrogen-terminated Silicon Substrates
Kalkofen, Bodo, Matichyn, Serhiy, Burte, EdmundYear:
2009
Language:
english
DOI:
10.1149/1.3118936
File:
PDF, 594 KB
english, 2009