Sputtered amorphous carbon nitride films

Journal of Materials Research 1995 / 12 Vol. 10; Iss. 12

Sputtered amorphous carbon nitride films

Kreider, K.G., Tarlov, M.J., Gillen, G.J., Poirier, G.E., Robins, L.H., Ives, L.K., Bowers, W.D., Marinenko, R.B., Smith, D.T.
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Volume:
10
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/JMR.1995.3079
Date:
December, 1995
File:
PDF, 616 KB
english, 1995
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