From micro‐ to nano‐machining – towards the nanometre era

Sensor Review 1996 / 06 Vol. 16; Iss. 2

From micro‐ to nano‐machining – towards the nanometre era

McKeown, Pat
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Volume:
16
Language:
english
Journal:
Sensor Review
DOI:
10.1108/02602289610115557
Date:
June, 1996
File:
PDF, 129 KB
english, 1996
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