SPIE Proceedings [SPIE Photonics West 2001 - LASE - San Jose, CA (Saturday 20 January 2001)] Laser Applications in Microelectronic and Optoelectronic Manufacturing VI - Propagation of short-pulsed laser radiation and stages of ablative deep-channel formation
Kononenko, Taras V., Klimentov, Sergei M., Konov, Vitali I., Pivovarov, P. A., Garnov, Serge V., Dausinger, Friedrich, Breitling, Detlef, Gower, Malcolm C., Helvajian, Henry, Sugioka, Koji, Dubowski,Volume:
4274
Year:
2001
Language:
english
DOI:
10.1117/12.432516
File:
PDF, 453 KB
english, 2001
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