Inspection of integrated circuit databases through reticle and wafer simulation: an integrated approach to design for manufacturing (DFM)
W. Howard, J. Tirapu Azpiroz, Y. Xiong, C. Mack, G. Verma, W. Volk, H. Lehon, Y. Deng, R. Shi, J. Culp, S. Mansfield, L. W. LiebmannLanguage:
english
DOI:
10.1117/12.604698
File:
PDF, 721 KB
english