Hyper NA water immersion lithography

B. W. Smith, A. Bourov, J. Zhou, L. Zavyalova, N. Lafferty, Y. Fan, F. Cropanese, A. Estroff

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Year:

2004

Language:

english

DOI:

10.1364/oft.2004.oma2

File:

PDF, 295 KB

english, 2004

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